Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
VIAF ID: 133794725 (Corporate)
Permalink: http://viaf.org/viaf/133794725
Preferred Forms
4xx's: Alternate Name Forms (2)
5xx's: Related Names (3)
- 511 2 _ ‡a International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics
- 511 2 _ ‡a Symposium on Silicon Nitride Thin Insulating Films ‡d (1983 : ‡c San Francisco, Calif.)
- 511 2 _ ‡a Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectrics
Works
Title | Sources |
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(2nd : 1986 : San Diego, Calif.). Proceedings ... c1987: | |
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium |