International SEMATECH
VIAF ID: 159263522 ( Corporate )
Permalink: http://viaf.org/viaf/159263522
Preferred Forms
- 110 2 _ ‡a International SEMATECH
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- 110 2 _ ‡a International SEMATECH
-
- 110 2 _ ‡a International SEMATECH
5xx's: Related Names (5)
- 551 _ _ ‡a Austin, Tex.
- 510 2 _ ‡a SEMATECH (Organization)
- 510 2 _ ‡a SEMATECH ‡e Nachfolger
- 510 2 _ ‡a SEMATECH ‡e Vorgaenger
- 510 2 _ ‡a Semiconductor Manufacturing Technology Consortium
Works
Title | Sources |
---|---|
Advances in resist technology and processing xviii, 2001: | |
Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA | |
Design for manufacturability through design-process integration: 28 February-2 March 2007, San Jose, California, USA | |
Emerging lithographic technologies 8 | |
Engineering statistics handbook. | |
ITRS | |
Metrology, inspection, and process control for microlithography XXIII : 23-26 February 2009, San Jose, California, United States | |
NIST/SEMATECH e-Handbook of statistical methods | |
Optical microlithography seventeen | |
Technology roadmap for semiconductors |