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Reinicke, Marco 1977- German National Library ISNI

VIAF ID: 103788472 (Personal)

Permalink: http://viaf.org/viaf/103788472

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  • 551 _ _ ‎‡a  Merseburg German National Library

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Investigation of physical and chemical interactions during etching of silicon in dual frequency capacitively coupled HBr/NF3 gas discharges German National Library

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