Lacombat, Michel J.
Lacombat, Michel J., 19..-
VIAF ID: 61102394 ( Personal )
Permalink: http://viaf.org/viaf/61102394
Preferred Forms
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- 100 1 _ ‡a Lacombat, Michel J.
- 100 1 _ ‡a Lacombat, Michel J.
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- 100 1 _ ‡a Lacombat, Michel J., ‡d 19..-
Works
Title | Sources |
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Optical microlithography and metrology for microcircuit fabrication : proceedings, ECO2, 27-28 April, 1989, Paris, France |