Gentili, M.
Gentili, Massimo
Gentili, M. (Massimo)
VIAF ID: 46861477 ( Personal )
Permalink: http://viaf.org/viaf/46861477
Preferred Forms
- 200 _ | ‡a Gentili ‡b Massimo
- 100 1 _ ‡a Gentili, M.
- 100 1 0 ‡a Gentili, M.
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- 100 1 _ ‡a Gentili, M.
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- 100 1 _ ‡a Gentili, Massimo
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4xx's: Alternate Name Forms (2)
Works
Title | Sources |
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ENHANCEMENT OF ALIGNMENT ACCURACY WITH A NOVEL X-RAY MASK IN MIX-AND-MATCH OF OPTICAL AND X-RAY LITHOGRAPHY | |
Nanolithography a borderland between STM, EB, IB, and X-ray lithographies [proceedings of the NATO advanced research workshop on nanolithography, a borderland between STM, EB, IB, and X ray lithographies, Frascati, Roma, Italy, April 6-8, 1993] |