Mathad, G.S.
VIAF ID: 35810970 ( Personal )
Permalink: http://viaf.org/viaf/35810970
Preferred Forms
- 100 1 _ ‡a Mathad, G. S.
- 100 1 _ ‡a Mathad, G. S.
- 100 1 _ ‡a Mathad, G. S.
- 100 1 _ ‡a Mathad, G.S.
Works
Title | Sources |
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Proceedings of the symposia on reliability of semiconductor devices/interconnections and dielectric breakdown, and laser process for microelectronic applications | |
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control | |
Symposium on Plasma Processing (3rd : 1981 : Denver, Colo.) Plasma processing, c1982 (a.e.) | |
Thin film materials, processes, and reliability : Plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium |