ASM International. Plasma Processes Committee
VIAF ID: 268379639 ( Corporate )
Permalink: http://viaf.org/viaf/268379639
Preferred Forms
4xx's: Alternate Name Forms (3)
5xx's: Related Names (2)
Works
Title | Sources |
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Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988 |