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Allegret, Stéphane 1979-... Sudoc [ABES], France ISNI

VIAF ID: 202227734 (Personal)

Permalink: http://viaf.org/viaf/202227734

ISNI: 0000  0001  3917  6298 

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Title Sources
Etude d’électrodes métalliques à base de tungstène, préparées par MOCVD, pour empilement de grille CMOS de technologie sub–65 nm Sudoc [ABES], France
Study of tungsten-based electrodes, deposited by MOCVD, for CMOS gate stack application beyond 65 nm technological node Sudoc [ABES], France

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