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Meziere, Jérôme 1976-... ISNI Sudoc [ABES], France

VIAF ID: 193864242 (Personal)

Permalink: //viaf.org/viaf/193864242

ISNI: 0000  0003  5712  8382 

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Modélisation et simulation numérique d'un réacteur CVD pour le dépôt de couches minces de SiC Sudoc [ABES], France
Numerical modeling and simulation of a CVD reactor dedicated to the growth of SiC epitaxial layer. Sudoc [ABES], France

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