SEMATECH (Organization)
Semiconductor Manufacturing Technology Consortium
Semiconductor manufacturing technology (Etats-Unis)
SEMATECH (Austin, TX)
SEMATECH not-for-profit consortium that performs research and development to advance chip manufacturing
SEMATECH (Organisation)
VIAF ID: 157546350 ( Corporate )
Permalink: http://viaf.org/viaf/157546350
Preferred Forms
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- 110 2 _ ‡a SEMATECH (Organization)
- 110 2 _ ‡a SEMATECH ‡c not-for-profit consortium that performs research and development to advance chip manufacturing
- 110 2 _ ‡a SEMATECH ‡g Austin, TX
- 110 2 _ ‡a Semiconductor Manufacturing Technology Consortium
- 110 2 _ ‡a Semiconductor manufacturing technology (Etats-Unis)
4xx's: Alternate Name Forms (10)
5xx's: Related Names (1)
- 510 2 _ ‡a International SEMATECH
Works
Title | Sources |
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Design for manufacturability through design-process integration four | |
Dry processing for submicrometer lithography, c1990: | |
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California | |
Emerging lithographic technologies two | |
Metrology, inspection, and process control for microlithography XXIV : 22-25 February 2010, San Jose, California, United States | |
Optical microlithography ten | |
Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California |