Northern California Microphotomask/Masking Working Group
VIAF ID: 139548559 ( Corporate )
Permalink: http://viaf.org/viaf/139548559
Preferred Forms
4xx's: Alternate Name Forms (2)
Works
Title | Sources |
---|---|
Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California | |
Submicron lithography |